Internationally reserved ISM radio band. Used for industrial plasma generators as well as for microwave ovens.
The resulting plasma is designated microwave plasma acording to the wave length of the radiation.
Microwave plasma is not generated by electrodes as usual in case of LF plasma and RF plasma, but by a magnetron. Magnetrons are allways installed outside of the plasma. A fused quartz window allows the radiation to irradiate the plasma chamber.