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Automatching for 13.56 MHz

Automatching 13.56 MHz

Areas of application:

Automatic or manual matching of a 13.56 MHz HF generator to a low-pressure plasma

Automatching for 13.56 MHz

  • HF power range: 100 W/300 W
  • Frequency: 13.56 MHz
  • HF mode: continuous or pulsed
  • Impedance: 50 Ohms
  • Input Connector: N jack
  • Output impedance: suitable for all plasma chambers from Diener Electronic with a volume up to 150 litres
  • HF output: N-panel jack to 100 watts or 7/16
    panel jack to 300 watts
  • Particularly suitable for use with HF generators from Diener Electronic or other 300 watts HF generators for 13.56 MHz, a 0 - 10 volt signal to provide for the forward and reverse power
  • Equipped with a micro-controller that can work independently as well as from a system PC
  • Remote control terminal for:
    - default start values
    - Setting the operating mode manual/auto
    - feedback of the current settings
  • RS232 port for software updates or remote control
  • Mains voltage: 88 - 264 VAC / 47 - 63 Hz
  • Power consumption: max. 65 watts
  • Mains plug: IEC
  • Weight: approx. 20 kg
  • Dimensions: 19-inch rack; 3HE