Low Cost System Atto

The 10.5-litre LOW COST ATTO PLASMA LABORATORY UNIT, with manual, PC and PCCE control, is mainly used in the following areas:

  • Small batch production
  • Analytics (REM, TEM)
  • Medical technology
  • Sterilization
  • Research and Development departments
  • Archeology
  • Textiles
  • Plastics

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

Brochure Atto

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Low-cost Atto plasma system with integrated PC control, Plasma cleaner, Plasma asher, Plasma etcher, Plasma etcher, Plasma activation for process development, Cleaning, Activation, Etching in small batches - plasma systems

Technical data: Atto plasma cleaner with manual control

Housing:
W 425 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via needle valves

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control:
Manual, process time via analogue timer

Atto plasma system with external PC control, plasma cleaner, plasma asher, plasma etcher, plasma activation for process development, cleaning, activation, etching in small batches - plasma systems

Technical data: Atto Plasma Cleaner with external PC control

Housing: 
W 525 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via MFCs

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control
PC control (Microsoft Windows XP)

Low-cost Atto plasma system with integrated PC control, Plasma cleaner, Plasma asher, Plasma etcher, Plasma etcher, Plasma activation for process development, Cleaning, Activation, Etching in small batches - plasma systems

Technical data: Atto Plasma Cleaner with integrated PC control

Housing:
W 525 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via MFCs

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control
PC control (Microsoft Windows XP)

Technical data: Atto Plasma Cleaner with integrated PCCE control

Housing:
W 525 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via MFCs

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control
PC control (Microsoft Windows CE)