Nano low-pressure plasma system

Nano plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation
Nano plasma system for process development, cleaning, activation, etching in small batches - Diener plasma systems
Nano plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation
Nano plasma system for process development, cleaning, activation, etching in small batches - Diener plasma systems
Nano plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation

Nano plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Nano plasma systems. Nano plasma systems are used primarily in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

NANO brochure

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Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 18 - 36 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round, with lid (approx. ∅ 267 mm, L 420 mm or L 600 mm) or
  • Stainless steel, rectangular, hinged door (approx. W 240 mm x D 420 mm or 600 mm)
  • Aluminium, round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door (approx.∅ 240 mm, L 400 mm or L 600 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single or multiple levels
  • RIE

Control

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies:

40 kHz: Power 0 - 300 W; 0 - 1000 W

13.56 MHz: Power 0 - 100 W; 0 - 300 W

2.45 GHz: Power 0 - 600 W;

 

All generators are continuously adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from various manufacturers (with active carbon filter, if required)

More options

Replacement part sets, pressure gauge, corrosive gas version, gas bottles, pressure reducer, heating plate, temperature display, heatable chamber, Faraday Box, plasma polymerization accessories, test inks, oxygen generator, slow ventilation, slow evacuation, TEM sample holder flange, maintenance/service, documentation in language of the country, installation on site incl. training. Further options are available on request