Yocto III

The Yocto III unit ist mainly used for the following applications:

  • Activation
  • Cleaning

Give us a call and we will be happy to advise you. Phone: +49 (0) 74 58 - 999 31-0

Basic Equipment

  • Power Supply: 230 V / 50 - 60 Hz

Gas Supply

  • One process gas through filter
  • Flow through valve (not adjustable)
  • Ventilation through filter

Vacuum Chamber

  • Borosilicate glass (UHP) round with lid (approx. ∅ 50 mm, L 150 mm)

Electrodes

  • One pair of electrode on the outside of the vacuum chamber

Control

  • Generator for plasma generation
  • 2 step switch
  • Start button
  • Power switch

Generator 

  • Frequency: 100 kHz
  • Power: 0 - 30 W

 Vacuum Pump

  • Dry vacuum pump (without oil)
  • Integrated into the system
  • Suction power: 0,75 m3/h