Plasma system Tetra 5200 LF PC used
Technical data
Switch cabinet
W 2000 mm, H 1800 mm, D 1000 mm
Chamber
W 1500 mm, H 2350 mm, D 1500 mm
aluminium rectangular
Chamber volume:
approx. 5200 litres
Gas supply
2 process gases regulated via mass flow controllers
Generator
3 pieces (each 40 kHz)
Control
PC control