Tetra 30-LF-PC with PC-control. Designed for production: Plasma cleaning, plasma activation and plasma etching

Rental system TETRA-30-LF-PC - available at short notice

The small scale system TETRA-30-LF-PC, with its 30-litre chamber volume, is used in production in the areas of cleaning, etching and activation.

Brochure TETRA

Technical data:

Switch cabinet:
W 600 mm, H 2 200 mm, D 850 mm

Chamber:
W 305 mm, H 300 mm, D 370 mm
(optional: D 625 mm)

Chamber volume:
approx. 34 litres

Gas supply:
3 gas channels via MFC

Generator:
40 kHz/0-1000 W
(optional: 13.56 MHz or 2.45 GHz)

Parts intake:
up to 6 product carriers
(optional: rotary drum)

Control
PC control using Windows

Options/accessories